The research analyzes relaxation processes in copper and tin films, and also in binary compositions Sn/Cu and Cu/Sn by measuring the dependence of electro-resistance on time. It is established that during exposing films at room temperature electro-resistance of copper thin-film samples grows, and in tin films decreases, in binary compositions Sn/Cu the electro-resistance decreases at the beginning, and then grows, while in binary composition Cu/Sn growth is observed from the moment of retention interval.

Key words: thin-film systems, mono-film, binary film, processes of relaxation, structural transformations, electro-resistance, processes of oxidation.